patent/US-5710069-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5710069-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9fc0a00eab3a757e8324b1e887d7ba97
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1429 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-1447
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-14
filingDate	1996-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1998-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a456f157e72b9308be39a2cf43dd527f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fca93918c373607a6a26ae84923105a8
publicationDate	1998-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5710069-A
titleOfInvention	Measuring slurry particle size during substrate polishing
abstract	A method of sensing a particle in a mixture includes providing (52) the mixture (36) having a particle (29, 30), moving (54) the mixture (36) in a direction, shining (56) a light into a portion of the moving mixture (36), reflecting a portion of the light off of the particle (29, 30) in the moving mixture (36), detecting and measuring (57) the reflected light, and using (58) the measured reflected light to determine a size of the particle (29, 30).
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priorityDate	1996-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
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isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400

Total number of triples: 82.