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publicationDate 1997-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5700361-A
titleOfInvention Method for manufacturing thin zirconia film
abstract A method for manufacturing a thin zirconia film comprises the steps: (a) preparing a suspension in which partially-stabilized or stabilized zirconia particles having electric charges are dispersed in a solvent; (b) positioning a pair of electrodes in the suspension; (c) applying an electric field between the electrodes, said zirconia particles moving to the electrode and said zirconia particles being deposited on the electrode electrochemically; and (d) sintering the zirconia film to form a partially-stabilized or stabilized thin zirconia film.
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