http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5695815-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate 1996-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1997-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26b106bab26259be9d861e7313ecc159
publicationDate 1997-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5695815-A
titleOfInvention Metal carboxylate complexes for formation of metal-containing films on semiconductor devices
abstract A method of forming a metal-containing film on a substrate, such as a semiconductor wafer. The method involves depositing a Group VIII metal carboxylate complex on the substrate, wherein the Group VIII metal is selected from the group consisting of Ru, Os, Rh, Ir, Pd, and Pt, and thermally decomposing the Group VIII metal carboxylate complex to form the metal-containing film.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6828256-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6673689-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6682602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6156599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004061990-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6399459-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6204172-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6225237-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7226640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5916690-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004147138-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6368398-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6217645-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114401976-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6323081-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002062037-A1
priorityDate 1996-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5401535-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129950273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129859782
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7612
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2969
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127956138
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129171024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129412139

Total number of triples: 49.