| abstract |
The disclosure describes a dry resist comprising: a biaxially oriented laminated polyester film whose surface layer on at least one side contains particles having an average particle diameter of 0.01 to 3.0 mu m, and has a center line average roughness of not less than 0.005 mu m and a maximum height of less than 1.5 mu m, and which has a haze of not more than 1.5%; a photoresist layer formed on said biaxially oriented laminated polyester film; and a protective film formed on said photoresist layer. |