http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5628883-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9620682ba299b24254be29b7fb4992f0
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S156-914
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C25-6293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32211
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C25-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
filingDate 1994-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1997-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ef87400c458bf37c83c660702eab9da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78f5004d9639177f818f596ec045bfca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f52313aec66d7e4aa1218c1832af3e5b
publicationDate 1997-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5628883-A
titleOfInvention Method for generating and activating plasma process of treatment using same, and apparatus therefor
abstract A method for generating plasma, comprising irradiating an electromagnetic wave to an energy converter capable of converting an irradiated electromagnetic wave to an electric energy and discharging said electric energy, in the presence of a rare gas in a chamber. A method for activating plasma, further comprising applying an electric cr magnetic field to said generated plasma, a process for treating a substrate, using the generated and optionally activated plasma, and apparatuses therefor are also disclosed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6855173-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6579465-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6841201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005050644-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7223716-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004129032-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723263-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6645343-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009005285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5908565-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6149829-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6564591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6691536-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6268303-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005081306-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6706076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004006828-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6793685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004147418-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007173403-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005044637-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206795-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6939837-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005256015-A1
priorityDate 1991-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4309295-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4138306-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129602314
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128546490
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23925
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559362
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID66205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391465
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID66205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453217193
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21881765
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6431
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451953330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129327014
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23501648
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040

Total number of triples: 75.