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filingDate 1994-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1997-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f70c6f3ae0f738949d6b5bc5c294896b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e84039e8c5095dfccfe0f8d39b72f7dd
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publicationDate 1997-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5591483-A
titleOfInvention Process for the preparation of metal nitride coatings from single source precursors
abstract Metal nitride coatings are deposited effectively by the decomposition of single source metal imido-amidoamine precursors perpared by the reaction of a pentavalent metal halide with a primary amine or hydrazine. With hydrazine-derived precursors, TaN coatings may be deposited at temperatures as low as 400 degrees Celcius or lower.
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