| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f481982f9992cbb527a6d31589832958 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1995-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50c09a3a7a1fbbdd899501da90881eb8 |
| publicationDate |
1996-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5583078-A |
| titleOfInvention |
Method for fabricating a planar dielectric |
| abstract |
Re-entrant angles in doped dielectrics produced from the decomposition of organo-silicon compounds are reduced or eliminated by the addition of a polar molecule to the dielectric deposition process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6313046-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001019876-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6844255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6355299-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6656854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7262503-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6501179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003068879-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6333556-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6858526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7112542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6812160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6121159-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6559062-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6350679-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6352933-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6455934-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6251470-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6548107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6156374-A |
| priorityDate |
1991-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |