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publicationDate 1996-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5569784-A
titleOfInvention Sulfonium salt and resist composition
abstract A novel sulfonium salt having at least one substituted aromatic group having acid labile groups and at least one nitrogenous aromatic group is provided. A chemically amplified, positive resist composition comprising the sulfonium salt as well as an alkali soluble resin and a dissolution inhibitor in an organic solvent has solved the PED problem.
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