| abstract |
A chemically amplified-type radiation-sensitive composition comprising: (a) an alkali-soluble binder resin made by a condensation reaction of: (i) hydroxystyrene moiety having formula [1] or [2]: <IMAGE> [1] <IMAGE> [2] wherein x is an integer from 2 to 300; with (ii) a monomethylolated phenolic compound having a formula [8]: <IMAGE> [3] wherein R1 and R2 are individually selected from the group consisting of lower alkyl group having 1-4 carbon atoms, lower alkoxy group having 1-4 carbon atoms, amino group, and carboxylic acid group; wherein R3 and R4 are individually selected from the group consisting of hydrogen, lower alkyl group having 1-4 carbon atoms, lower alkoxy groups having 1-4 carbon atoms, an amino group, and a carboxylic group; and wherein a mole ratio of the hydroxystyrene moiety to the monomethylolated phenolic compound is from about 1:10 to about 10:1; (b) at least one alkaline dissolution inhibitor containing acid-cleavable groups; and (c) at least one compound that results in generation of an acidic moiety under irradiation. |