| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3504 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate |
1993-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bd0363aef7e2d45ee1df8a2e0a2e581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e16b43d9f5a66cfac378eb2eea2e5948
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45a83845e1d8c7e3ca9c8475e82720fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7cb1318e6ef74ddbbd52a16fad58100
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dcf37dd26961ad1c3bfed1e8bba7626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74ec90b1c796102ae3cdf759da3c3250 |
| publicationDate |
1996-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5534066-A |
| titleOfInvention |
Fluid delivery apparatus having an infrared feedline sensor |
| abstract |
An apparatus for processing a layer on a workpiece includes a source of reactant fluid, a reaction chamber having a support for the workpiece and a fluid delivery apparatus for feeding an input fluid into the reaction chamber with the input fluid being utilized to process the material. An infrared sensor is adapted to cooperate with the fluid delivery apparatus for sensing the concentration of a component of the input fluid. The infrared sensor includes an infrared light source positioned to direct a beam of infrared light at an infrared light detector through the input fluid. The infrared light detector produces an electrical output signal indicative of the amount of light received by the detector and therefore not absorbed by the input fluid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9510774-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6174373-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004069408-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003056728-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6482649-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022216400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012009694-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6863772-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5665608-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6070599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5709772-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002176927-A1 |
| priorityDate |
1993-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |