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grantDate 1996-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1996-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5523370-A
titleOfInvention Poly(para-T-butoxycarbonyloxystyrene) and method of making
abstract Provided is a poly(para-t-butoxycarbonyloxystyrene) having recurring units of the formula: ##STR1## which is prepared by anionic polymerization of para-t-butoxycarbonyloxystyrene. The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution and development, meeting the requirements of resist materials. The method allows for simple preparation of such polymers.
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