| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R17-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-01 |
| filingDate |
1994-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24d05dea4796506e1413a4104a37de06 |
| publicationDate |
1996-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5512842-A |
| titleOfInvention |
High accuracy inspection method and apparatus of semiconductor integrated circuits |
| abstract |
An inspection method and apparatus of semiconductor integrated circuits, in which a specification, a measuring system error in measurements and a number N of measurement repeat times are read in and a distance between parts of the semiconductor integrated circuit is measured to obtain measured value. The measured value is compared with the specification to execute a first non-defective/defective discrimination. The measured value determined to be defective by the first discrimination is further compared with a new discrimination reference obtained by adding the measuring system error to the specification to execute a second non-defective/defective discrimination. Against the semiconductor integrated circuits discriminated to be defective in the first discrimination and to be non-defective in the second discrimination, the measurement is carried out N times and an average value of the N number of measured values is calculated. This average value is further compared with the specification to execute a third non-defective/defective discrimination. As a result, the measuring system error components are averaged and thus a false notice rate of the essentially non-defective ICs can be reduced. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19709939-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005255931-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9870343-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9061322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012072174-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6289257-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012095803-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015220489-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8154595-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0992805-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9037436-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007047924-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008191730-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0992805-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6681361-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8148996-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008202201-A1 |
| priorityDate |
1993-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |