| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e08fd85d97265d6c31ab40f372843d81 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F2202-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13394
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13613 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13454 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1339 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362 |
| filingDate |
1993-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab9f55e8cba108ed500774a120b4da4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37cd76531ee96efca35f0ba8ba189c49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad12843110999ea28ffbb69e636fb56f |
| publicationDate |
1996-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5491571-A |
| titleOfInvention |
Liquid crystal display including electrodes and driver devices integrally formed in monocrystalline semiconductor layer |
| abstract |
A silicon dioxide etch stop layer (30) is formed on an inner surface (28b) of a monocrystalline silicon layer (28), and a silicon carrier wafer (52) is bonded to the etch stop layer. The exposed inner surface (28a) of the monocrystalline layer (28) is uniformly thinned to approximately 4 micrometers. Front electrodes (20) in the form of heavily doped areas, and microelectronic transistor driver devices (42) for the electrodes (20) are integrally formed on the outer surface (28a) of the monocrystalline layer (28). A front plate (12) is bonded to the outer surface (28a) of the monocrystalline layer (28), and the carrier (52) is removed. The central portion of the etch stop layer (30) is removed from the inner surface (28b) of the monocrystalline layer (28), and the exposed central portion (28c) of the layer (28) is uniformly thinned to approximately 400 angstroms using plasma assisted chemical etching. A back plate (14 ) having a back electrode (16) formed thereon is adhered to the unetched peripheral portion (28d) of the inner surface (28b) of the monocrystalline layer (28) to define a sealed space (24) between the front and back electrodes (12,14) which is filled with liquid crystal material (26). Large scale integrated driver circuitry (38,40) is fabricated in the peripheral portion (28d) of the layer (28) laterally external of the back plate (14) and externally interconnected by via holes (28g,28h) and wirebonds (44,45). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004195572-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11331692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11192340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11167532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6433362-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11660841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7385655-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014166199-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7769253-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10014177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6498635-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0037996-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11123954-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6373543-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11097509-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6030887-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004007706-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7459726-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5748268-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11535553-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004061126-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6200908-B1 |
| priorityDate |
1993-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |