| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1993-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3519bddcb801454e438e2a950780a3be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04f17fe902497fc83a69f64727904630
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_370a4a488a6dbde066a6710355ac2419 |
| publicationDate |
1995-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5451484-A |
| titleOfInvention |
Positive resist composition |
| abstract |
A positive resist composition comprising a quinonediazide compound and an alkali-soluble resin containing resin (A) obtainable through a condensation reaction of at least one compound represented by the general formula (I): <IMAGE> (I) wherein R1, R2 and R3 independently of one another each represent a hydrogen atom or an alkyl or alkoxy group having 1-4 carbon atoms and k represents 1 or 2, at least one polyphenol compound represented by the general formula (II): <IMAGE> (II) wherein R4' to R6' each represent a hydrogen atom or an alkyl or alkoxy group and n represents 1 or 2, with an aldehyde compound. This positive resist composition is excellent in properties such as profile, resolution, heat resistance, etc. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5707558-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6191197-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5798201-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6083657-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5849457-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018314154-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6013407-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8822123-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5843616-A |
| priorityDate |
1992-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |