| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 |
| filingDate |
1993-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc670a08f657af729207d1d3995ce231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf555cfa6f1b36500b470791708aa6db |
| publicationDate |
1995-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5449799-A |
| titleOfInvention |
Compound for depositing copper layers |
| abstract |
Described is the deposition of copper-containing layers on substrates by decomposition of organometallic copper compounds containing acetylacetonato or substituted acetylacetonato and isonitrile. The decomposition is preferably carried out in accordance with CVD method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6281122-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084100-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0194291-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108031492-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007259173-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1142894-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1142894-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004234687-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5863327-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8507038-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6171661-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010301478-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6355106-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0070116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6369256-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6150265-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6090964-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5990006-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108031492-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6102993-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7482035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0008230-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6818783-B2 |
| priorityDate |
1992-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |