| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de0b31ad1eab71b151b13a3fe7eb31aa |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 |
| filingDate |
1993-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bfd69220883dda39d1e7a5f59cb9fad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02549d13ae2b63723cff0da0e8360b83 |
| publicationDate |
1995-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5408489-A |
| titleOfInvention |
Optical layer for excimer laser |
| abstract |
An optical layer and arrangements with such a layer are proposed which is predominantly of Ta 2 O 5 and having an absorption constant for ultra-violet light less than 0.0075 for light of 308 nm. Such a layer is produced by ion-beam sputtering of a target which target is predominantly made of Ta 2 O 5 . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9496521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2682375-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016099437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6726814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013119356-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5661596-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9240568-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5981075-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6372646-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3358377-A4 |
| priorityDate |
1993-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |