| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-60 |
| filingDate |
1994-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6659b14b7d344e0730d46f1e36ceeae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_795aea68172ce2f51a7c5b02af22c017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf9e57f52b3a2556a95c0db9428eccf7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7db169f3e93d711fa3c090fa6dd43e06 |
| publicationDate |
1995-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5378498-A |
| titleOfInvention |
Antistatic solution for microlithic measurement |
| abstract |
An antistatic solution is disclosed to aid in the measurement of patterned resists by scanning electronic microscopes. The solution comprises a quaternary ammonium salt and a suitable solvent. The anion of the salt is selected from the group consisting of saccharinate, nitrate, sulfates, alkyl sulfates and alkoxylate. The four groups of the cation are selected from the group consisting of alkyl and alkyl derivatives. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7880144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009173882-A1 |
| priorityDate |
1991-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |