http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5362598-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 1993-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1994-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01948ad40e3ea52913e3224ee92148c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fda4cca3a02682a7d08e2b3db0ad13a8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9b0528a8ae6ad84bf0d1255548c1110 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7da8c98881b99ec8a5663dabe5c80c91 |
| publicationDate | 1994-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5362598-A |
| titleOfInvention | Quinone diazide photoresist composition containing alkali-soluble resin and an ultraviolet ray absorbing dye |
| abstract | A photoresist composition which comprises a compound of the general formula: <IMAGE> (I) wherein R1, R2 and R3 are the same or different and represent a hydrogen atom, a hydroxyl group, -OCOR4, -O-R5, -OSi(R6)3, a halogen atom, an optionally substituted alkyl group, an optionally substituted alkenyl group, an optionally substituted phenyl group or an optionally substituted aralkyl group; R4, R5 and R6 represent an optionally substituted lower alkyl group or an optionally substituted phenyl group; X and Y are the same or different and represent -CN, -COOR7, -CONR8R9, <IMAGE> R7 represents an alkyl group; R8 and R9 are the same or different and represent a hydrogen atom, an optionally substituted alkyl or phenyl group; R10 represents a hydrogen atom, an optionally substituted alkyl group or a hydroxyl group; and a is a number of 1 to 2, which is suitable for forming fine patterns having high resolution on a substrate having high reflectance. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004191670-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5641607-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5648202-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5670297-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5686585-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5698352-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5731110-A |
| priorityDate | 1989-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 99.