| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dcebf5a7f7ddc3b081f70e8ce1c4097 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-503 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 |
| filingDate |
1992-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b572a8de1e882f19bc081df72e6cf5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b690d3fa29b6d48dc011cb5a76e7062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc0e0739589d50aea31b1da9bb3167fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18af3ee17b04c6b855b54a7908fe2ec8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c24621e51c1082d18438844a40945c85 |
| publicationDate |
1994-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5358754-A |
| titleOfInvention |
Method for forming diamond films by vapor phase synthesis |
| abstract |
A method for forming diamond films by vapor phase synthesis comprising a process of forming the diamond films on a substrate by direct current discharge plasma, in an atmosphere of a reaction gas including a gas containing at least carbon and hydrogen, or in an atmosphere of a mixed gas containing at least a carbon-containing gas and a hydrogen gas, at a gas pressure between 0.1 and 5 Torr and a substrate temperature between 300° and 1000° C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006160180-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5569501-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5803967-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6786176-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112981362-A |
| priorityDate |
1991-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |