| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-037 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-762 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225 |
| filingDate |
1990-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca7088e5276f0cd82c2b97b521e3831a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d2ebee11b5f5ac555b91cf60bded74c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e31f24acdd24e761ec954cefc05ba099 |
| publicationDate |
1994-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5338697-A |
| titleOfInvention |
Doping method of barrier region in semiconductor device |
| abstract |
An exposed active surface is prepared on a major surface of a semiconductor substrate. A source gas containing an impurity component is applied to the exposed active surface to adsorb thereon a film of the impurity component so as to form a barrier region along the major surface of the semiconductor substrate. A semiconductor device is formed on the major surface of the semiconductor substrate and is protected by the barrier region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8558323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6642620-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6048782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6198114-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112903800-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10403735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5543356-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006003532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007138518-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6080611-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5856696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6559037-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5874352-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6204155-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6399961-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6291845-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5719422-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010140681-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008191204-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6921708-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6420764-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5563100-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011042669-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5882958-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6613626-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11575019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5589410-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7683455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5622880-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5668025-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5599735-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6593174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6190179-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11443977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8143678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6403427-B2 |
| priorityDate |
1989-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |