| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F12-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1992-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e33b60f81fd3738e4cb5f4e778bdecb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6d0f373c2be10f166d26335c12da74b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf0c00ec27553d7294b1124b36ca0a12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3f7b12d6486335e786045da041448a4 |
| publicationDate |
1994-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5314931-A |
| titleOfInvention |
Resist compositions |
| abstract |
A resist based on a living polymer is provided. Living anionic polymerization of p-alkoxycarbonylstyrene monomers results in polymers having a molecular weight distribution (Mw/Mn) of from 1 to 1.4. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006074262-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE38254-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006160020-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5750309-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5955240-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9323150-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5849461-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358030-B2 |
| priorityDate |
1991-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |