http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5286600-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_630b360599ea5cf4b5bcbc0c6c0a3e2d
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-146
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 1992-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1994-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2655aec4013fbcba5c9a3852c9585f53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bbbcbd53fe5f0e5f094684b17370fac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3afa54dbba2bad5b0e8abef314ff4627
publicationDate 1994-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5286600-A
titleOfInvention Negative photosensitive composition and method for forming a resist pattern by means thereof
abstract A negative photosensitive composition comprising (a-1) a compound having at least two organic groups of the following formula (I): n n --OCH.sub.2 OR.sup.1 (I) n n wherein R 1 is an alkyl group, in its molecule and an alkali-soluble resin, or (a-2) an alkali-soluble resin having at least two organic groups of the above formula (I) in its molecule, and (b) a photo-acid-generating material.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8389197-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009092921-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6013412-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2299325-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1076261-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6124405-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106019832-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6511783-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5585218-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8206887-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9804490-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5529885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11548844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9969829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5928818-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7981588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6162592-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009269693-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007281243-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007259273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5580695-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11429023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9244348-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5882844-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9645493-B2
priorityDate 1991-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0232972-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02170165-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0164248-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0215270-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129743382
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129090196
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID103634
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129300601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129650716
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128435415
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21389908
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127491446
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17809376
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128180546
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129529575
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128858255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67278
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129948539
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID35156
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID223146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15376223
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31256
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23038
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129024234
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7108
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15221
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127802502
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128058370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129705757
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128294299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128418210
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129872083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129294975
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32595
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129727876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129755831
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129634830
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86912
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127798697
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128125867
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129477495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127900651
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127607039
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129518676
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128778198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129589511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129721338
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127532759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6645
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18954570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136045538
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128713985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129569275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129624274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129550669
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11162511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128562115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917753
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129336420
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129421862
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11728255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15701542
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128521623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128457677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128912737
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128071048
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128129643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128129451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7013
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21938875
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8095
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12348
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54449881
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129880247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129231824
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62540
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128165014
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135988206
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7757
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID244430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127750531
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14273993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127722595
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128640388
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127973827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8020
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11392281
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128792572
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128785182
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4663752
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128772007
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127418496
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129618461
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7771
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129409683
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID99824
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31242
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127842892
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128821702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7762
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129480521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12180
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21924729

Total number of triples: 175.