| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a6a9431aa1fe5109ca95ad4e332231b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H3-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H3-02 |
| filingDate |
1993-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a7c805d493267453cd0b44df34e9ece
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e9398a316df0d81cadf674024612402 |
| publicationDate |
1994-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5280174-A |
| titleOfInvention |
Method and apparatus for producing a thermal atomic oxygen beam |
| abstract |
Atomic oxygen atoms are routed to a material through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at the surface of the material. However, the material surface continues to be exposed to the atomic oxygen. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5560781-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5360764-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10249509-B2 |
| priorityDate |
1993-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |