http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5250392-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9161aebc19a284f75a386fe9e3b984d8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09B69-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09B29-0813 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09B69-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09B29-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 1993-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1993-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_975ac9a1bbce595a07ce8c25d1bad1b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0430b2435d307e6ded247393206669c |
| publicationDate | 1993-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5250392-A |
| titleOfInvention | Process of developing a negative-working radiation-sensitive photoresist containing cyclized rubber polymer and contrast enhancing azo dye |
| abstract | A negative-working, radiation-sensitive composition comprising an admixture in a solvent of: n (a) at least one cyclized rubber polymer, n (b) at least one photoactive compound, and n (c) an effective contrast enhancing amount of at least one rubber-soluble azo dye containing a reactive acrylate or methacrylate group of formula (I): ##STR1## wherein Q is a reactive group of the structure ##STR2## wherein Y is either H or CH 3 ; wherein R 1 is either H, CH 3 , C 2 H 5 , CH 2 CH 2 CN, CH CH 2 OH or Q; n wherein R 2 is either H, CH 3 , OCH 3 , or NHCOCH 3 ; n wherein R 3 is either H, OCH 3 or OC 2 H 5 ; and n wherein X is selected from the group consisting of an unsubstituted or a substituted benzene, thiazole, thiophene, benzothiazole, benzoisothiazole, thiadiazole, and pyrazole moiety having, if substituted, 1-3 substituent groups selected from cyano, nitro, acetyl, and halogen groups; the amount of said cyclized rubber being about 90% to 99.5% by weight, the amount of said photoactive component being about 0.5% to about 10% by weight, based on the total solids content of said radiation-sensitive composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6696216-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5783359-A |
| priorityDate | 1991-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.