http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5248585-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03627f82d4edc6567f9627df6efdde5d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G79-025 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G79-02 |
| filingDate | 1991-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1993-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eed0ec386294b8ecf35ee16c335a6d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b439533dcadefc67b92550b6347e549 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4565619e6a0e9466c4d2ce1cbd829e6 |
| publicationDate | 1993-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5248585-A |
| titleOfInvention | Polyphosphazene binder resins for photoresists comprising as photosensitizers o-quinone diazide esters |
| abstract | This invention relates to novel radiation sensitive compositions. More particularly the invention relates to photoresists containing phosphorus and nitrogen linked polymers; i.e., polyphosphazenes, useful in the preparation of a relief pattern on a substrate; e.g., a silicon wafer or aluminum plate. The polyphosphazenes of in this invention can be synthesized by the condensation of N-trimethylsilylalkoxyphosphorimides. Radiation sensitive positive photoresist compositions of the invention can be developed in aqueous base developer or organic solvent developer The base developer dissolution properties of the composition can be controlled by incorporating carboxylate groups into the polyphosphazene. The polyphosphazenes utilized in this invention have good solubility properties in various organic solvents and also have good mechanical, electrical, adhesion and thermal properties. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5464932-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5698664-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009121232-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9528150-A1 |
| priorityDate | 1991-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 206.