| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029 |
| filingDate |
1991-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1993-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f475b4d482790770f6e75d5cc333ad74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d07da7ac7b238a341ccccc982e5acba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0f4c22788da266771af316f768e1e66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a89b9e1c97eb1db231b9757cab9841e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26e6321cc950b1fbad184b3152fb53d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f06b6b8099f3c5e56ef0deb5af9cd76 |
| publicationDate |
1993-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5229251-A |
| titleOfInvention |
Dry developable photoresist containing an epoxide, organosilicon and onium salt |
| abstract |
A dry developable photoresist composition that contains in admixture a polymeric epoxide; a di- or polyfunctional organosilicon material; and an onium salt; and use thereof to produce an image. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6783918-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5656336-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007076060-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2761368-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6569343-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7571979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1065059-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003225199-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6008266-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6864311-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9843134-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009269707-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8007990-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7654637-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007076059-A1 |
| priorityDate |
1991-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |