patent/US-5209028-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5209028-A

Outgoing Links

Predicate	Object
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classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C3-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C9-003
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C3-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
filingDate	1992-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1993-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0825c0bb702e750410103f38c869ca60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b222f48b96928ca2b9b293529cc86338 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_292dbac5204c7dd24176cff9bc430f91
publicationDate	1993-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5209028-A
titleOfInvention	Apparatus to clean solid surfaces using a cryogenic aerosol
abstract	The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
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