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filingDate 1992-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1993-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31b7c2988554756691607a4779a6b0a8
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publicationDate 1993-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5200544-A
titleOfInvention Resist materials
abstract A class of resist compositions sensitive to deep ultraviolet radiation includes a resin sensitive to acid and a composition that generates acid upon exposure to such radiation. A group of nitrobenzyl materials is particularly suitable for use as the acid generator.
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