| abstract |
A vacuum valve includes a first sealing member in contact with the space on a low pressure side of a space shut-off of the vacuum valve is composed of an inorganic material, and a second sealing member in contact with the space on the high pressure side is composed of an elastomer. The sealing state of the vacuum valve is made adjustable in two steps such that the first sealing member and the second sealing member are closed in the first sealing step and in the second sealing step the first sealing member is closed and the second sealing member is open. |