| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S428-901
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate |
1990-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1992-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35f1c40ad505e5fe027dac9790bac674 |
| publicationDate |
1992-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5160779-A |
| titleOfInvention |
Microprobe provided circuit substrate and method for producing the same |
| abstract |
A probe assembly for testing semiconductor wafer chips includes microprobes embedded in a circuit substrate. The microprobes are pillar-shaped conductors formed in through holes in a base of the substrate. One end of the microprobe is flush with the base surface contacts and is electrically connected through a reinforcing substrate to a probe assembly test head which generates various test signals. The other end of the pillar-shaped microprobes projects beyond the base to make contact with and deliver test signals to various electrodes of a chip to be tested. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009094826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1950572-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6620650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009151157-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008136428-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011080186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6249053-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002125901-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6495394-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100455499-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7443180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7482824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11555830-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11562984-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7952372-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1950572-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114270201-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7832091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011149740-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7876088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011199111-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8564322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008136427-A1 |
| priorityDate |
1989-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |