| abstract |
A system for generating a gaseous polyhydridic Group IV-VI compound, comprising a vessel containing a solid precursor metal compound for the polyhydridic Group IV-VI compound, and a source of a fluid-phase protonic activator compound reactive with the precursor compound to yield as reaction product (a) the polyhydridic compound and (b) a solid reaction product compound containing the metal moiety, e.g., a non-volatile metal salt, together with means for flowing the activator compound from the source thereof to the vessel containing the solid precursor compound. The precursor compound may suitably comprise a metal moiety such as lithium, sodium, magnesium, zinc, potassium, aluminum, and intermetallic complexes and alloys thereof. In a preferred aspect, wherein arsine is generated, the precursor compound may suitably comprise a metal arsenide, and the protonic activator compound is water or an acid such as hydrogen chloride. An appertaining method of generating such polyhydridic Group IV-VI compounds is likewise disclosed, together with a reaction vessel for carrying out the contacting of precursor and activator therein. Various precursor compositions, including various support materials, are discribed. The gas generating system of the invention obviates the need for large inventories of high pressure gas cylinders in semiconductor manufacturing operations, and produces the desired Group IV-VI hydride compound in situ on demand in a safe and controllable fashion. |