http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5126230-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5539e85987921f605c2435d0251b02b6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 1990-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1992-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d3f937d22e1bbbe473be30080d187ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9552bf145df3f1884d1021efce80f233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e54d207251aad05f9887ed48f080cf9 |
| publicationDate | 1992-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5126230-A |
| titleOfInvention | High contrast, positive photoresist developer containing alkanolamine |
| abstract | Compositions and methods for developing quinone diazide positive-working photoresists. The compositions consist essentially of an aqueous solution of a tetraalkylammonium hydroxide and an adjunct having a structure selected from: <IMAGE> and <IMAGE> wherein n is 0 or 1; m is 1 or 2; and each R1 and R2 is independently selected from hydrogen, methyl, or ethyl, but in Structure I the two R2's are not both ethyl. The methods involve use of this composition to develop the indicated photoresists. The addition of an adjunct of the indicated type prevents the formation of irregular deposits on the edges of unexposed portions of the photoresist lines when the photoresist is developed. Selection of these adjuncts also increases the uniformity of line widths of photoresist lines developed according to the present invention, and increases the process latitude of the developer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5756267-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900802-B2 |
| priorityDate | 1987-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 117.