| abstract |
A variable focal length lens integrated onto a silicon wafer. A light transmitting material such as gas or liquid is entrapped in a cavity in the wafer. The cavity has a flexible, light transmitting wall. The wall provides one surface of the lens. When the material inside the cavity is heated or cooled, the wall flexes and the focal length of the lens changes. The lens is suitable for use in temperature and pressure sensors, fiber optic communication networks, optical computers, and other applications. |