| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28512
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3617
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-361 |
| filingDate |
1989-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1991-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f382afe429467b6a0e2f5ab70b4bf7c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27f8b301f3479c283903d7821f6b2deb |
| publicationDate |
1991-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5035782-A |
| titleOfInvention |
Method for the formation of monomolecular adsorption films or built-up films of monomolecular layers using silane compounds having an acetylene or diacetylene bond |
| abstract |
A method for the formation of monomolecular adsorption films of a silane compound having a diacetylene bond is described. The silane compound is chemically adsorbed on a substrate through ═SiO-- bonds and the resultant film is significantly reduced in number of defects such as pinholes. When the monomolecular film is irradiated with actinic light, the diacetylene bonds are convered into a conjugated diacetylene polymer. Similarly, a built-up film of a desired number of monomolecular layers of a silane compound having an acetylene bond formed on a substrate by chemical adsorption and a corresponding number of monomolecular layers of an aliphatic acid or alcohol having an acetylene bond and alternately deposited on the first-mentioned layer is also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6156393-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5436033-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5260115-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5536982-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7084060-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6878417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6319566-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5512328-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8178164-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5116638-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009053417-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6099958-A |
| priorityDate |
1988-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |