Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c24684033fba97d1ad845ce453a57e3 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F28-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F28-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L41-00 |
filingDate |
1989-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1991-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_989c187915090f8df1c34bf17202929a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cccf4c6adedfb3c02bbe0109ca12512d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa7613fc33b22a03c2d412623549a783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57c414089248b51f0917b7b702ebc6c0 |
publicationDate |
1991-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-4988606-A |
titleOfInvention |
Negative-working radiation-sensitive mixture with polymer having 1,2,3-thiadiazole groups, and recording material produced therefrom |
abstract |
A negative-working radiation-sensitive mixture comprising a binder and a polymer containing 1,2,3-thiadiazole groups is disclosed. The binder is a polyfunctional compound having functional groups that react with ketene. The polymer is a compound obtained by polymerization of a compound of the general formula I ##STR1## in which R is a polymerizable group. If the polymer is a copolymer containing comonomers having functional groups capable of reacting with ketene, the binder can be omitted. The negative-working radiation-sensitive mixture is particularly suitable for UV, electron beam and X-ray lithography. |
priorityDate |
1988-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |