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publicationDate 1990-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4970099-A
titleOfInvention Perfluoropolymer coated pellicles
abstract Pellicles having films bearing at least one coating of perfluoropolymers as an anti-reflective surface, the perfluoropolymers being copolymerized units of tetrafluoroethylene and perfluro (alkyl vinyl) ether, and further comprising iodo moieties.
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