| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_daabfabdb3db3f56b489619c6c7fbdfd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0163
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
1988-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1990-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90e65c9fd418974046acbb6e389f45b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9336315990ef379433741910a04a32d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdd6ca4c9e946133270e7bc58b5b034b |
| publicationDate |
1990-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4959293-A |
| titleOfInvention |
Deep UV photoresist with alkyl 2-diazo-1-ones as solubility modification agents |
| abstract |
2-diazo-1-ones are useful deep UV photoresist solubility modification agents exhibiting improved photosensitivity allowing shorter deep UV exposure times to achieve the same extent of photoreaction as with prior art solubility modification agents. The 2-diazo-1-one solubility modification agents when used as photoactive solubility modification components in photoresist compositions permit the photoresist compositions to act as either positive or negative photoresist compositions depending upon the developer employed, namely, as a positive resist when a metal ion containing developer is employed and as a negative resist when a metal ion free developer is employed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8748074-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5648195-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5627006-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012129101-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9502851-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5473045-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005257709-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5725970-A |
| priorityDate |
1988-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |