| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-146 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 |
| filingDate |
1988-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1990-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f973102f81a83a970f6cd1162a5a6714
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_187bf0ccfb1800d312a88462f1198bfd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_740720982e641bd2b8ff80f4448ba89d |
| publicationDate |
1990-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4925774-A |
| titleOfInvention |
Microlithographic process for producing circuits using conductive organic films sensitive to electromagnetic radiation and to charged particles, as well as to the circuits and components obtained by this process |
| abstract |
The invention relates to a microlithographic process for producing circuits using organic, conductive films sensitive to electromagnetic radiation and to charged particles. This process for producing electricity conducting zones on a substrate consists of depositing on said substrate a coating of an electricity conducting, organic compound, such as alkyl pyridinium-tetracyanoquinodimethane and then irradiating certain locations (2,3) of the coating by means of charged particles and/or electromagnetic radiation, so that the irradiated locations become insulating and that on the organic compound coating the electricity conducting zones (1) are directly formed at the desired locations. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5331056-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5356744-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6838384-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008266514-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8120740-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001019036-A1 |
| priorityDate |
1987-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |