| abstract |
A pressure measurement system comprising a capacitance device whose outer interrelated capacitance plates are maintained in a relatively fixed position relative to one another while an intermediate capacitance plate responds to temperature. The plates are in a restricted enclosure containing a gas dielectric medium. The pressure of the gas dielectric medium (and consequently the density of the gas) is controlled as a function of a pressure to be measured. By measurement of capacitance relationships as a function of the temperature and density of the gas dielectric medium, a pressure measurement is obtained. The system is constructed with like types of materials where the capacitance device is in an enclosure chamber which is immersed in a pressure media. The capacitance device is constructed with a symmetrical arrangement to balance out effects of gravity or vibration. Construction of micro components utilizes an electrostatic bonding system which eliminated arcing during bonding. |