abstract |
A high spatial and time resolution measuring apparatus for optically measuring a fine area in an object to be measured, the apparatus comprising a stage for mounting a specimen thereon, a light source for generating a first light, a first optical system for leading the first light from the light source to the specimen, an objective lens for magnifying an image of a second light from the specimen, a second optical system for imaging a part of the image in a form of a slit, a streak tube having a photocathode at a position of image formation of the second optical system for receiving the part of the image and forming a streak image thereof, a housing for shielding the first optical system, the objective lens and the second optical system from stray light. |