| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5b0b75f7b5a55963e5e5249d54cb12d8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-108 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-108 |
| filingDate |
1988-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1989-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6f30713341dec8a0bd619ca5d8c4912 |
| publicationDate |
1989-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4875082-A |
| titleOfInvention |
Schottky barrier photodiode structure |
| abstract |
A Schottky barrier photodiode for detecting infrared radiation uses implantation of metal ions to form a metal silicide. An annular N+ type silicon guard ring is formed in a p-type silicon substrate. Metal ions are implanted into the exposed surface area of the silicon substrate surrounded by the silicon guard ring. The resulting structure is annealed to form a silicide of the implanted metal. A portion of the silicon substrate encircled by the silicon guard ring and above the metal silicide is removed. A thin oxide passivating layer is formed above the metal silicide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6465786-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0508679-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101675526-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006138495-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0504987-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104143581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0504987-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE44637-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101433993-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5696025-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103794673-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103794673-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008274601-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104241437-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104241437-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008137243-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5236872-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005274871-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358103-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7858505-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5227315-A |
| priorityDate |
1986-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |