http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4859938-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2632 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1987-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1989-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06530e68c5f226a4367a4082043761d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a221d650568e603974515d413e825ba |
| publicationDate | 1989-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-4859938-A |
| titleOfInvention | Novel technique to detect oxydonor generation in IC fabrication |
| abstract | A novel technique to detect oxydonor generation in semiconductor wafers. Oxydonor generation in a P-type substrate may be sufficient to create a P-N junction within the substrate which may adversely affect device performance. A technique of the present invention is a two-step process for determining the presence of such an oxydonor generated P-N junction. For a capacitor device, the capacitance of the device is measured under varying test voltages to determine a capacitance-voltage response. Then a second capacitance-voltage response is measured when the device is subjected to an external energy source. For a diode device, the forward current is measured with the device under varying test voltages to determine a current-voltage response. Then a second currrent-voltage response is measured when the device is subjected to an external energy source. By comparing device response with and without the application of external energy, a device having oxydonor generation problems is efficiently detected. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5196802-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5103183-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5032786-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5389990-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5200693-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5420522-A |
| priorityDate | 1986-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.