| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c30ef07844258792c8c4eac6614ff8d3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03C5-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate |
1988-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1989-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1539b03c47a7744bde731fe6f1d377af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3e8d124f0cd4a2d96d82fa7f8ffe551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b186b8f175118f2deade8217e82363a1 |
| publicationDate |
1989-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4828965-A |
| titleOfInvention |
Aqueous developing solution and its use in developing positive-working photoresist composition |
| abstract |
An aqueous developing solution useful in developing positive-working photoresists comprising: -A. Soluble Alkali Metal Phosphate 1.50-3.00% by weight -B. Soluble Alkali Metal Silicate 1.00-2.00% by weight -C. Mono (lower alkanol) amine 0.40-5.00% by weight -D. Soluble Alkylene Glycol 0.25-3.00% by weight -E. Lower Alkanol 0.05-1.00% by weight -F. Water Balance to 100% by - weight - |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5478682-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004202961-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8187792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1103859-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5607503-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010047723-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6255042-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1103859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005142345-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6127101-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8148055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7179580-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008020330-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-9400920-A |
| priorityDate |
1988-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |