| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
1987-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1989-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bde5cd28c7e5d6b8da3215c838bec307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5627b3fd499ce535eb5793b201d59924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3899bbf8c6185a7556b546a68235c300 |
| publicationDate |
1989-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4810619-A |
| titleOfInvention |
Photolithography over reflective substrates comprising a titanium nitride layer |
| abstract |
For fine line lithography of a reflective substrate, a layer of titanium nitride is applied between the reflective surface and the photoresist that is absorbant at the wavelength of light used to expose the photoresist. The resolution of the photoresist is improved, even when an absorbant dye is used in the photoresist. The titanium nitride can be readily removed at the same time as the reflective layer is patterned, thereby avoiding the need of a separate step to remove the absober layer during etching of the reflective substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5328560-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5153689-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8354786-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9140900-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5219788-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110256102-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009058285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002075391-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5480748-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7154549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0501178-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9349977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013012853-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5731246-A |
| priorityDate |
1987-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |