Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aedec4251cb45bd2828a4644aa6d8a9e |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-046 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04 |
filingDate |
1986-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1989-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6c0aeb1790cc8ac6ffa4536a5b23b96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34ff859b1b56c3dbb72c6e2be10a4a01 |
publicationDate |
1989-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-4806225-A |
titleOfInvention |
Desmearing and plated-through-hole apparatus |
abstract |
An integrated plasma desmearing and plated-through-hole apparatus for first plasma desmearing a printed circuit board and then plating through the holes of the plated circuit board by sputtering. The apparatus comprises a plurality of vacuum chambers serially interconnected together. Preferably, five vacuum chambers are provided including a loading chamber, a desmearing chamber, a plating preparation chamber, a plating chamber and an unloading chamber. Airtight isolation doors isolate each chamber from the others. A transport system is provided for serially transporting the printed circuit boards through the chambers. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8226795-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8372238-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009288773-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5611858-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010194505-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100349582-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10109448-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6035805-A |
priorityDate |
1982-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |