patent/US-4801380-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4801380-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1dd98ad4ee076841fec541542f952f58
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S264-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2325-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2323-283
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D67-0072 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D67-0065
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
filingDate	1987-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1989-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a83e91853c76de82f86641ac9f392f96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b57f93cfbb92b5a83cfed7fa90f06c01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e264b522ad088f11dff14325135dabc3
publicationDate	1989-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-4801380-A
titleOfInvention	Method of producing a silicon film with micropores
abstract	The present invention relates to a method of producing micropores having diameters of less than 20 nanometers in straight sides in silicon film. The silicon film produced by this process may be attached to a substrate material and used as a filter in molecular separation processes.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE42315-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8709355-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647885-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8367017-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9513860-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1233927-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1233927-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004212028-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7771661-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6326228-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003080060-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9109420-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007116605-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007116882-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0798554-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7468529-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010171950-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0798554-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5100596-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5324965-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7608305-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005042743-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005142298-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003102263-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010136704-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5138411-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006065528-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8105471-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6780786-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7465381-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6369405-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003205552-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5753014-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5798556-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE41762-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE42249-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6913697-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2254188-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2254188-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008007838-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6187446-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006169587-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5430300-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004161369-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5348618-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7361313-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6685841-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06504582-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03045539-A1
priorityDate	1987-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate

Subject

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4380865-A

http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977

Total number of triples: 85.