patent/US-4790258-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4790258-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0aa4909604b53e92db230cad6ecf893
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S414-135
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
filingDate	1987-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1988-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b407a3edef1d2043bcbb468a063c6e3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20e2ad970bc1c99f67b40d8f9d08fe34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d84e4c4af1861e2e67c3c763ff12ab87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca1cbf5344b9473b221bce95890946c8
publicationDate	1988-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-4790258-A
titleOfInvention	Magnetically coupled wafer lift pins
abstract	An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin.
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Total number of triples: 283.