| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12597
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-1291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12903 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 |
| filingDate |
1987-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1988-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba91844c1c414d44b32745c62f4d89c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bca87ead07d4547fee83c17e2523feb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dda9e414a7cc277a9099898b2c7e2c0d |
| publicationDate |
1988-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4770947-A |
| titleOfInvention |
Multiple density mask and fabrication thereof |
| abstract |
A multi-layer structure that includes a transparent dielectric substrate, a layer of a nickel-containing steel alloy, and a layer of copper and/or chrome. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1940719-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6215077-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002145644-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6238778-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6379487-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6902259-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5620818-A |
| priorityDate |
1987-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |