| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e899199238cd97bdebfa84869ece733b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-56 |
| filingDate |
1985-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1987-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d86776b16e74d60831a93dabe5571ace
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36e3cbfedaa7e8faf85f9968d88ff987 |
| publicationDate |
1987-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4663414-A |
| titleOfInvention |
Phospho-boro-silanol interlayer dielectric films and preparation |
| abstract |
There are disclosed certain categories of novel spin-coating compositions comprising phosphorus-doped and/or boron-doped silsesquioxane oligomers. Cured interlayer dielectric films prepared therefrom have a superior combination of defined properties, particularly including adhesion (of single-coat and multiple coats) and/or resistance against degradation at temperatures above 500° C. The spin-coating compositions are prepared in a critical manner from critical raw materials. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5089303-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9576799-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6914114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002128388-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5527872-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003237052-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003120018-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5093153-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015235940-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4801507-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5665845-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8992806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003199659-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076719-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5061567-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9953920-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104981518-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6969753-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4758620-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864898-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6956097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4765866-A |
| priorityDate |
1985-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |