| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b94d2715cda37c1f23e48f9f4f23422 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate |
1985-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1987-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c7b48c5616eb6edcf47920f824fcbe9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6eb0dd9ea0615ae674e453141d8f348 |
| publicationDate |
1987-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4654231-A |
| titleOfInvention |
Vanadium dioxide film deposition |
| abstract |
A method of producing high quality stoichiometric thin films of vanadium dioxide by reactive evaporation utilizes an electron beam to evaporate a source of vanadium in a controlled, low pressure oxygen gas environment with the film being deposited at a predetermined rate onto a substrate which is heated to and maintained at a predetermined temperature above 500° C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935388-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104775101-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102534731-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005241932-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0577667-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0577667-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8894769-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102534731-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5433836-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4815962-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104775101-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006216161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5061684-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006289853-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7513981-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009263580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0361265-A1 |
| priorityDate |
1985-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |